Paper Title:
Ion Energy Distributions and Sidewall Profiles in Reactive Ion Etching
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 140-142)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
121-132
DOI
10.4028/www.scientific.net/MSF.140-142.121
Citation
P. W. May, D. P. Field, D.F. Klemperer, Y.P. Song, "Ion Energy Distributions and Sidewall Profiles in Reactive Ion Etching", Materials Science Forum, Vols. 140-142, pp. 121-132, 1993
Online since
October 1993
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Price
$32.00
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