Paper Title:
Practical Applications of In-Situ Plasma-Etching Diagnostic Techniques
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 140-142)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
171-190
DOI
10.4028/www.scientific.net/MSF.140-142.171
Citation
D.J. Thomas, P. Southworth, M.C. Flowers, N.J. Dartnell, R. Greef, Y. Liu, "Practical Applications of In-Situ Plasma-Etching Diagnostic Techniques", Materials Science Forum, Vols. 140-142, pp. 171-190, 1993
Online since
October 1993
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Price
$32.00
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