Paper Title:
Bonding Configuration and Defects in Glow-Discharge Amorphous SiNx:H Films Deposited at 300°C and 500°C
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Periodical
Materials Science Forum (Volumes 140-142)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
335-358
DOI
10.4028/www.scientific.net/MSF.140-142.335
Citation
S. Hasegawa, Y. Amano, L. He, T. Inokuma, Y. Kurata, "Bonding Configuration and Defects in Glow-Discharge Amorphous SiNx:H Films Deposited at 300°C and 500°C", Materials Science Forum, Vols. 140-142, pp. 335-358, 1993
Online since
October 1993
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