Paper Title:
Doped Glasses for ULSI-Technology: Integration of Molecular Engineering and Plasma-CVD
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 140-142)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
359-380
DOI
10.4028/www.scientific.net/MSF.140-142.359
Citation
H. Treichel, J. v. Tomkewitsch, O. Spindler, "Doped Glasses for ULSI-Technology: Integration of Molecular Engineering and Plasma-CVD", Materials Science Forum, Vols. 140-142, pp. 359-380, 1993
Online since
October 1993
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Price
$32.00
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