Paper Title:
Sputter Deposition of Thin Films for High Mobility Poly-Si TFT Fabrication
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 140-142)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
387-404
DOI
10.4028/www.scientific.net/MSF.140-142.387
Citation
T. Serikawa, "Sputter Deposition of Thin Films for High Mobility Poly-Si TFT Fabrication", Materials Science Forum, Vols. 140-142, pp. 387-404, 1993
Online since
October 1993
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Price
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