Paper Title:
Ion Assisted Thin Film Growth in Dual Microwave/Radio Frequency Plasmas
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 140-142)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
405-420
DOI
10.4028/www.scientific.net/MSF.140-142.405
Citation
L. Martinu, M. R. Wertheimer, "Ion Assisted Thin Film Growth in Dual Microwave/Radio Frequency Plasmas", Materials Science Forum, Vols. 140-142, pp. 405-420, 1993
Online since
October 1993
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Price
$32.00
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