Paper Title:
High Powered Pulsed Plasma Enhanced Deposition of Thin Film Semiconductor and Optical Materials
  Abstract

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Periodical
Materials Science Forum (Volumes 140-142)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
421-438
DOI
10.4028/www.scientific.net/MSF.140-142.421
Citation
I.P. Llewellyn, K.J.A. Sheach, R.A. Heinecke, "High Powered Pulsed Plasma Enhanced Deposition of Thin Film Semiconductor and Optical Materials", Materials Science Forum, Vols. 140-142, pp. 421-438, 1993
Online since
October 1993
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Price
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