Paper Title:
ECR Plasma Etching Technology for ULSI
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 140-142)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
521-540
DOI
10.4028/www.scientific.net/MSF.140-142.521
Citation
S. Samukawa, "ECR Plasma Etching Technology for ULSI", Materials Science Forum, Vols. 140-142, pp. 521-540, 1993
Online since
October 1993
Authors
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.