Paper Title:
Plasma Etching of Patterned Tungsten
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 140-142)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
565-582
DOI
10.4028/www.scientific.net/MSF.140-142.565
Citation
S. Franssila, "Plasma Etching of Patterned Tungsten", Materials Science Forum, Vols. 140-142, pp. 565-582, 1993
Online since
October 1993
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Price
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