Paper Title:
Damage Assessment of Dry Etched III-V Semiconductors for Nanoelectronics
  Abstract

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Periodical
Materials Science Forum (Volumes 140-142)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
619-640
DOI
10.4028/www.scientific.net/MSF.140-142.619
Citation
R. Cheung, "Damage Assessment of Dry Etched III-V Semiconductors for Nanoelectronics", Materials Science Forum, Vols. 140-142, pp. 619-640, 1993
Online since
October 1993
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Price
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