Paper Title:
Reactive Ion Beam Etching for Microcavity Surface Emitting Laser Fabrication: Technology and Damage Characterization
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 140-142)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
641-658
DOI
10.4028/www.scientific.net/MSF.140-142.641
Citation
A. Matsutani, T. Tadokoro, F. Koyama, K. Iga, "Reactive Ion Beam Etching for Microcavity Surface Emitting Laser Fabrication: Technology and Damage Characterization", Materials Science Forum, Vols. 140-142, pp. 641-658, 1993
Online since
October 1993
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