Paper Title:
Alkane Plasma Etching of Gallium Arsenide
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 140-142)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
659-688
DOI
10.4028/www.scientific.net/MSF.140-142.659
Citation
V.J. Law, M. Tewordt, S.G. Ingram, G.A.C. Jones, "Alkane Plasma Etching of Gallium Arsenide", Materials Science Forum, Vols. 140-142, pp. 659-688, 1993
Online since
October 1993
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.