Paper Title:
Effects of ECR-Plasma Excitation in GaAs MBE Growth
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 140-142)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
689-704
DOI
10.4028/www.scientific.net/MSF.140-142.689
Citation
T. Shibata, N. Yamamoto, N. Kondo, Y. Nanishi, M. Fujimoto, "Effects of ECR-Plasma Excitation in GaAs MBE Growth", Materials Science Forum, Vols. 140-142, pp. 689-704, 1993
Online since
October 1993
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Price
$32.00
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