Paper Title:
DC Saddle-Field Plasma-Enhanced Vapour Deposition
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 140-142)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
89-106
DOI
10.4028/www.scientific.net/MSF.140-142.89
Citation
R.V. Kruzelecky, S. Zukotynski, "DC Saddle-Field Plasma-Enhanced Vapour Deposition", Materials Science Forum, Vols. 140-142, pp. 89-106, 1993
Online since
October 1993
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Price
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