Paper Title:
U-Shaped Diffusion Profiles of Zn Atoms in GaAs by Electron Beam Doping
  Abstract

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Periodical
Materials Science Forum (Volumes 143-147)
Edited by
Helmut Heinrich and Wolfgang Jantsch
Pages
1421-1426
DOI
10.4028/www.scientific.net/MSF.143-147.1421
Citation
A. Takeda, T. Wada, "U-Shaped Diffusion Profiles of Zn Atoms in GaAs by Electron Beam Doping", Materials Science Forum, Vols. 143-147, pp. 1421-1426, 1994
Online since
October 1993
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