Role of Point Defects in Oxygen Agglomeration in Si |
| Journal |
Materials Science Forum (Volumes 143 - 147) |
| Volume |
Defects in Semiconductors 17 |
| Edited by |
Helmut Heinrich and Wolfgang Jantsch |
| Pages |
147-152 |
| DOI |
10.4028/www.scientific.net/MSF.143-147.147 |
| Citation |
Michio Tajima et al., 1993, Materials Science Forum, 143-147, 147 |
| Authors |
Michio Tajima, Hiroshi Takeno, M. Warashina, Takao Abe |
| Keywords |
Oxygen, Photoluminescence (PL), Silicon, Thermal Donor, Vacancy |
| Full Paper |
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