Paper Title:
Role of Point Defects in Oxygen Agglomeration in Si
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 143-147)
Edited by
Helmut Heinrich and Wolfgang Jantsch
Pages
147-152
DOI
10.4028/www.scientific.net/MSF.143-147.147
Citation
M. Tajima, H. Takeno, M. Warashina, T. Abe, "Role of Point Defects in Oxygen Agglomeration in Si", Materials Science Forum, Vols. 143-147, pp. 147-152, 1994
Online since
October 1993
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.