Paper Title:
Phase Transitions at the Amorphous/Crystalline Interface in Ion-Implanted Silicon and Their Role in End-of-Range Defect Formation
  Abstract

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Periodical
Materials Science Forum (Volumes 143-147)
Edited by
Helmut Heinrich and Wolfgang Jantsch
Pages
1505-1510
DOI
10.4028/www.scientific.net/MSF.143-147.1505
Citation
M. Seibt, J. Imschweiler, H.A. Hefner, "Phase Transitions at the Amorphous/Crystalline Interface in Ion-Implanted Silicon and Their Role in End-of-Range Defect Formation", Materials Science Forum, Vols. 143-147, pp. 1505-1510, 1994
Online since
October 1993
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