On the Influence of Transition Metal Impurities on the Oxygen Precipitation in CZ-Grown Silicon |
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| Journal | Materials Science Forum (Volumes 143 - 147) |
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| Volume | Defects in Semiconductors 17 |
| Edited by | Helmut Heinrich and Wolfgang Jantsch |
| Pages | 1529-1534 |
| DOI | 10.4028/www.scientific.net/MSF.143-147.1529 |
| Citation | Manfred Reiche, 1993, Materials Science Forum, 143-147, 1529 |
| Authors | Manfred Reiche |
| Keywords | Metal Impurities, Precipitation, Process-Induced Defects |
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