Paper Title:
On the Influence of Transition Metal Impurities on the Oxygen Precipitation in CZ-Grown Silicon
  Abstract

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Periodical
Materials Science Forum (Volumes 143-147)
Edited by
Helmut Heinrich and Wolfgang Jantsch
Pages
1529-1534
DOI
10.4028/www.scientific.net/MSF.143-147.1529
Citation
M. Reiche, "On the Influence of Transition Metal Impurities on the Oxygen Precipitation in CZ-Grown Silicon", Materials Science Forum, Vols. 143-147, pp. 1529-1534, 1994
Online since
October 1993
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