DLTS Studies of Thermally Treated Carbon-Rich Silicon |
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| Journal | Materials Science Forum (Volumes 143 - 147) |
|---|---|
| Volume | Defects in Semiconductors 17 |
| Edited by | Helmut Heinrich and Wolfgang Jantsch |
| Pages | 153-158 |
| DOI | 10.4028/www.scientific.net/MSF.143-147.153 |
| Citation | N.B. Urli et al., 1993, Materials Science Forum, 143-147, 153 |
| Authors | N.B. Urli, V. Borjanović |
| Keywords | Carbon Impurity, Dislocation, Oxygen Impurity, Silicon |
| Full Paper | 
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