Paper Title:
Structure Investigations of Heteroepitaxial CoSi2/Si Layers Formed by Ion Implantation
  Abstract

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Periodical
Materials Science Forum (Volumes 143-147)
Edited by
Helmut Heinrich and Wolfgang Jantsch
Pages
1577-1582
DOI
10.4028/www.scientific.net/MSF.143-147.1577
Citation
P. Gaiduk, F. Komarov, A. Witzmann, S. Schippel, "Structure Investigations of Heteroepitaxial CoSi2/Si Layers Formed by Ion Implantation", Materials Science Forum, Vols. 143-147, pp. 1577-1582, 1994
Online since
October 1993
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