Paper Title:
Influence of Oxygen on External Phosphorus Gettering in Disordered Silicon Wafers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 143-147)
Edited by
Helmut Heinrich and Wolfgang Jantsch
Pages
1629-1634
DOI
10.4028/www.scientific.net/MSF.143-147.1629
Citation
S. Martinuzzi, I. Périchaud, "Influence of Oxygen on External Phosphorus Gettering in Disordered Silicon Wafers", Materials Science Forum, Vols. 143-147, pp. 1629-1634, 1994
Online since
October 1993
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.