Paper Title:
Phosphorus Diffusion Gettering of Gold in Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 143-147)
Edited by
Helmut Heinrich and Wolfgang Jantsch
Pages
1641-1646
DOI
10.4028/www.scientific.net/MSF.143-147.1641
Citation
E. Ö. Sveinbjörnsson, O. Engström, U. Södervall, "Phosphorus Diffusion Gettering of Gold in Silicon", Materials Science Forum, Vols. 143-147, pp. 1641-1646, 1994
Online since
October 1993
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Price
$32.00
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