The Diffusion of Gold during the Gettering Influence of Phosphorus |
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| Journal | Materials Science Forum (Volumes 143 - 147) |
|---|---|
| Volume | Defects in Semiconductors 17 |
| Edited by | Helmut Heinrich and Wolfgang Jantsch |
| Pages | 1647-1652 |
| DOI | 10.4028/www.scientific.net/MSF.143-147.1647 |
| Citation | Horst Zimmermann, 1993, Materials Science Forum, 143-147, 1647 |
| Authors | Horst Zimmermann |
| Keywords | Gettering, Gold Diffusion, Phosphorus Diffusion, Self-Interstitial |
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