Paper Title:
Defect Characterization in P Isotype Si/SiGe/Si Heterostructures by Space Charge Spectroscopy
  Abstract

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Periodical
Materials Science Forum (Volumes 143-147)
Edited by
Helmut Heinrich and Wolfgang Jantsch
Pages
495-500
DOI
10.4028/www.scientific.net/MSF.143-147.495
Citation
G. Bremond, A. Souifi, P. Degroodt, P. Warren, D. Dutartre, G. Guillot, "Defect Characterization in P Isotype Si/SiGe/Si Heterostructures by Space Charge Spectroscopy", Materials Science Forum, Vols. 143-147, pp. 495-500, 1994
Online since
October 1993
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