Sources of Hydrogen in III-V Device Processing |
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| Journal | Materials Science Forum (Volumes 148 - 149) |
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| Volume | Hydrogen in Compound Semiconductors |
| Edited by | S.J. Pearton |
| Pages | 141-158 |
| DOI | 10.4028/www.scientific.net/MSF.148-149.141 |
| Authors | Fan Ren |
| Keywords | Annealing, Deposition, Dry Etching, HBT, Hydrogen, Implantation, Wet Etching |
| Full Paper | 
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