Paper Title:
Sources of Hydrogen in III-V Device Processing
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 148-149)
Edited by
S.J. Pearton
Pages
141-158
DOI
10.4028/www.scientific.net/MSF.148-149.141
Citation
F. Ren, "Sources of Hydrogen in III-V Device Processing", Materials Science Forum, Vols. 148-149, pp. 141-158, 1994
Online since
December 1993
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Price
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