Paper Title:
Plasma Passivation of III-V Semiconductor Surfaces
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 148-149)
Edited by
S.J. Pearton
Pages
159-188
DOI
10.4028/www.scientific.net/MSF.148-149.159
Citation
E.S. Aydil, R.A. Gottscho, "Plasma Passivation of III-V Semiconductor Surfaces", Materials Science Forum, Vols. 148-149, pp. 159-188, 1994
Online since
December 1993
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Price
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