Hydrogen Implantation in III-V Compound Semiconductors and its Redistribution with Annealing |
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| Journal | Materials Science Forum (Volumes 148 - 149) |
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| Volume | Hydrogen in Compound Semiconductors |
| Edited by | S.J. Pearton |
| Pages | 189-218 |
| DOI | 10.4028/www.scientific.net/MSF.148-149.189 |
| Citation | John M. Zavada et al., 1993, Materials Science Forum, 148-149, 189 |
| Authors | John M. Zavada, R.G. Wilson |
| Keywords | Annealing, Atom Distribution, Hydrogen, Implantation |
| Full Paper | 
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