The Role of Hydrogen in the Growth of III-V Compound Semiconductors by OMVPE |
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| Journal | Materials Science Forum (Volumes 148 - 149) |
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| Volume | Hydrogen in Compound Semiconductors |
| Edited by | S.J. Pearton |
| Pages | 27-60 |
| DOI | 10.4028/www.scientific.net/MSF.148-149.27 |
| Citation | W.S. Hobson, 1993, Materials Science Forum, 148-149, 27 |
| Authors | W.S. Hobson |
| Keywords | AlGaAs, AsH3, GaAs, Hydrogen, InGaAs, OMVPE, PH3 |
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