The Role of Hydrogen in UHV Growth of III-V Semiconductors |
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| Journal | Materials Science Forum (Volumes 148 - 149) |
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| Volume | Hydrogen in Compound Semiconductors |
| Edited by | S.J. Pearton |
| Pages | 3-26 |
| DOI | 10.4028/www.scientific.net/MSF.148-149.3 |
| Authors | C.R. Abernathy |
| Keywords | AsH3, ECR, GaAs, Hydrogen, Metal-Organic, MO-MBE, PH3 |
| Full Paper | 
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