Paper Title:
Shallow Levels Passivation in Implanted and Plasma Hydrogenated Compound Semiconductors
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 148-149)
Edited by
S.J. Pearton
Pages
321-348
DOI
10.4028/www.scientific.net/MSF.148-149.321
Citation
B. Pajot, "Shallow Levels Passivation in Implanted and Plasma Hydrogenated Compound Semiconductors", Materials Science Forum, Vols. 148-149, pp. 321-348, 1994
Online since
December 1993
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Price
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