Hydrogen in III-V Compound Semiconductors |
| Journal |
Materials Science Forum (Volumes 148 - 149) |
| Volume |
Hydrogen in Compound Semiconductors |
| Edited by |
S.J. Pearton |
| Pages |
393-480 |
| DOI |
10.4028/www.scientific.net/MSF.148-149.393 |
| Citation |
S.J. Pearton, 1993, Materials Science Forum, 148-149, 393 |
| Authors |
S.J. Pearton |
| Keywords |
CH4/H2, Cleaning, Deep Level, Dopant Passivation, Dry Etching, ECR, GaAs, Growth, HBr/H2, Hl/H2, Hydrogen, InGaAs, InP, Process, Wet Etching |
| Full Paper |
Get the full paper by clicking here
|
