Paper Title:
Aspects of Large-Area and Area-Selective CVD
  Abstract

  Info
Periodical
Edited by
M.A.J. Somers, E.J. Mittemeijer and J. Schoonman
Pages
29-42
DOI
10.4028/www.scientific.net/MSF.154.29
Citation
J.-O. Carlsson, "Aspects of Large-Area and Area-Selective CVD", Materials Science Forum, Vol. 154, pp. 29-42, 1994
Online since
March 1994
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Price
$32.00
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