Aspects of Large-Area and Area-Selective CVD |
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| Journal | Materials Science Forum (Volume 154) |
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| Volume | Surface Layers - Structure-Property Relations |
| Edited by | M.A.J. Somers, E.J. Mittemeijer and J. Schoonman |
| Pages | 29-42 |
| DOI | 10.4028/www.scientific.net/MSF.154.29 |
| Citation | Jan-Otto Carlsson, 1994, Materials Science Forum, 154, 29 |
| Authors | Jan-Otto Carlsson |
| Full Paper | 
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