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Chemical Vapor Deposition of Diamond and Ceramic Coatings
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Aspects of Large-Area and Area-Selective CVD
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Chemical Potentials Driving Diffusional Flow in Multilayers
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Stress and Volume Changes in Amorphous Mo/Si Multilayers on Annealing
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Kinetics of Gas-Solid Interactions
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HomeMaterials Science ForumMaterials Science Forum Vol. 154Chemical Vapor Deposition of Diamond and Ceramic...

Chemical Vapor Deposition of Diamond and Ceramic Coatings

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Periodical:

Materials Science Forum (Volume 154)

Pages:

3-12

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.154.3

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Online since:

March 1994

Authors:

Karl E. Spear

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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