Paper Title:
Stress and Volume Changes in Amorphous Mo/Si Multilayers on Annealing
  Abstract

  Info
Periodical
Edited by
M.A.J. Somers, E.J. Mittemeijer and J. Schoonman
Pages
55-68
DOI
10.4028/www.scientific.net/MSF.154.55
Citation
O.B. Loopstra, E.R. van Snek, T.H. de Keijser, E. J. Mittemeijer, "Stress and Volume Changes in Amorphous Mo/Si Multilayers on Annealing", Materials Science Forum, Vol. 154, pp. 55-68, 1994
Online since
March 1994
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Price
$32.00
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