Stress and Volume Changes in Amorphous Mo/Si Multilayers on Annealing |
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| Journal | Materials Science Forum (Volume 154) |
|---|---|
| Volume | Surface Layers - Structure-Property Relations |
| Edited by | M.A.J. Somers, E.J. Mittemeijer and J. Schoonman |
| Pages | 55-68 |
| DOI | 10.4028/www.scientific.net/MSF.154.55 |
| Citation | O.B. Loopstra et al., 1994, Materials Science Forum, 154, 55 |
| Authors | O.B. Loopstra, E.R. van Snek, T.H. de Keijser, Eric J. Mittemeijer |
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