Defect Injection and Diffusion in Semiconductors |
| Journal |
Materials Science Forum (Volumes 155 - 156) |
| Volume |
Reactive Phase Formation at Interfaces and Diffusion Processes |
| Edited by |
Y. Limoge and J.L. Bocquet |
| Pages |
475-492 |
| DOI |
10.4028/www.scientific.net/MSF.155-156.475 |
| Citation |
Nicolaas Stolwijk et al., 1994, Materials Science Forum, 155-156, 475 |
| Authors |
Nicolaas Stolwijk, Hartmut Bracht, H.-G. Hettwer, Wilfried Lerch, Helmut Mehrer, A. Rucki, W. Jäger |
| Keywords |
Dislocations, Gallium Arsenide, Kick-Out Mechanism, Nitridation, Oxidation, Precipitation, Self-Interstitial, Silicidation, Silicon, Stacking Fault, Vacancy, Void |
| Full Paper |
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