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Electronmicrodiffraction (EBSP) in the Scanning Electron Microscope (SEM): Further Hardware Development to Improve Pattern Quality

Journal Materials Science Forum (Volumes 157 - 162)
Volume Textures of Materials - ICOTOM 10
Edited by H.J. Bunge
Pages 137-142
DOI 10.4028/www.scientific.net/MSF.157-162.137
Citation Jarle Hjelen et al., 1994, Materials Science Forum, 157-162, 137
Authors Jarle Hjelen, A.H. Qvale, Ø. Gomo
Keywords CCD Camera, Electron Backscattered Pattern (EBSP), Pattern Resolution, Spatial Resolution
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