Paper Title:
Characterization by X-Ray Diffraction of PZT (Pb(ZrxTi1-x)O3) Thin Films on Pt/TiN/BPSG/Si Substrate
  Abstract

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Periodical
Materials Science Forum (Volumes 166-169)
Edited by
R. Delhez and E.J. Mittemeijer
Pages
379-386
DOI
10.4028/www.scientific.net/MSF.166-169.379
Citation
E. Cattan, F. Varnière, G. Chevrier, "Characterization by X-Ray Diffraction of PZT (Pb(ZrxTi1-x)O3) Thin Films on Pt/TiN/BPSG/Si Substrate", Materials Science Forum, Vols. 166-169, pp. 379-386, 1994
Online since
July 1994
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