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Semiconductor Processing and Characterization with Lasers

Volumes 173 - 174
doi: 10.4028/www.scientific.net/MSF.173-174
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Femtosecond Time-Resolved Microscopy of Laser-Induced Morphology Changes

Authors: D. von der Linde

1

Low Temperature Deposition and Crystallization of Silicon by Means of Laser Techniques

Authors: Motohiro Hirose

7

Femtosecond-Pulse Laser Microstructuring of Semiconducting Materials

Authors: W. Kautek, Joachim Krüger

17

Modification of Foreign Atom Concentrations and Profiles in Silicon and Si1-x-y GexCy Alloys by Laser Chemical Etching

Authors: J. Boulmer, A. Desmur, B. Bourguignon, J.-B. Ozenne, R. Laval, A. Aliouchouche, D. Débarre, J.-P. Budin

23

Properties of Recrystallized Amorphous Silicon Prepared by XeCl Excimer Laser Irradiation

Authors: I. Ulrych, K.M.A. El-Kader, V. Cháb, J. Kocka, P. Prikryl, V. Vydra, R. Cerný

29

Kinetics of Laser-Induced Synthesis and Crystallization of Thin Semiconductors Films

Authors: K. Kolev, L.D. Laude

35

Surface Patterning and Thin-Film Formation by Pulsed-Laser Ablation

Authors: D. Bäuerle, Enno Arenholz, J. Heitz, S. Proyer, E. Stangl, B. Luk'yanchuk

41

Laser Patterning of CuInSe2/Mo/SLS Structures for the Fabrication of CuInSe2 Sub Modules

Authors: L. Quercia, S. Avagliano, A. Parreta, E. Salza, P. Menna

53

UV-Excimer Laser Ablation Patterning of II-VI Compound Semiconductors

Authors: P.H. Key, D. Sands, F.X. Wagner

59

Fabrication and Characterisation of N+ Doped Laser Crystallised Polysilicon

Authors: E. Al-Nuaimy, J.M. Marshall, T.E. Dyer, A.R. Hepburn, J.F. Davies

67

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