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Semiconductor Processing and Characterization with Lasers

Materials Science Forum Volumes 173 - 174

• Papers
• Abstracts

• p1 Femtosecond Time-Resolved Microscopy of Laser-Induced Morphology Changes   [ 380 K ]
  Authors: D. von der Linde
• p7 Low Temperature Deposition and Crystallization of Silicon by Means of Laser Techniques   [ 333 K ]
  Authors: Motohiro Hirose
• p17 Femtosecond-Pulse Laser Microstructuring of Semiconducting Materials   [ 428 K ]
  Authors: W. Kautek, Joachim Krüger
• p23 Modification of Foreign Atom Concentrations and Profiles in Silicon and Si_1-x-y Ge_xC_y Alloys by Laser Chemical Etching   [ 327 K ]
  Authors: J. Boulmer, A. Desmur, B. Bourguignon, J.-B. Ozenne, R. Laval, A. Aliouchouche, D. Débarre, J.-P. Budin
• p29 Properties of Recrystallized Amorphous Silicon Prepared by XeCl Excimer Laser Irradiation   [ 349 K ]
  Authors: I. Ulrych, K.M.A. El-Kader, V. Cháb, J. Kocka, P. Prikryl, V. Vydra, R. Cerný
• p35 Kinetics of Laser-Induced Synthesis and Crystallization of Thin Semiconductors Films   [ 202 K ]
  Authors: K. Kolev, L.D. Laude
• p41 Surface Patterning and Thin-Film Formation by Pulsed-Laser Ablation   [ 460 K ]
  Authors: D. Bäuerle, Enno Arenholz, J. Heitz, S. Proyer, E. Stangl, B. Luk'yanchuk
• p53 Laser Patterning of CuInSe₂/Mo/SLS Structures for the Fabrication of CuInSe₂ Sub Modules   [ 420 K ]
  Authors: L. Quercia, S. Avagliano, A. Parreta, E. Salza, P. Menna
• p59 UV-Excimer Laser Ablation Patterning of II-VI Compound Semiconductors   [ 524 K ]
  Authors: P.H. Key, D. Sands, F.X. Wagner
• p67 Fabrication and Characterisation of N⁺ Doped Laser Crystallised Polysilicon   [ 343 K ]
  Authors: E. Al-Nuaimy, J.M. Marshall, T.E. Dyer, A.R. Hepburn, J.F. Davies
• p73 Pulsed Laser Ablation: A Method for Deposition and Processing of Semiconductors at an Atomic Level   [ 432 K ]
  Authors: J.J. Dubowski
• p81 Vacuum Ultraviolet Deposition of Silicon Dielectrics   [ 485 K ]
  Authors: Ian W. Boyd
• p93 Conditions for Heterophase Junction Formation in Laser Deposited PbTe Films   [ 311 K ]
  Authors: V. Gaydarova
• p99 High-Quality Narrow-Gap Thin Films Produced by Quasi-Continuous-Wave IR-Laser-Assisted Evaporation   [ 212 K ]
  Authors: S.V. Plyatsko, Yu.S. Gromovoj
• p105 Laser-Induced Etching of Si Surfaces; the Effect of Weak Background Light   [ 102 K ]
  Authors: H. Grebel, T. Gayen