Femtosecond-Pulse Laser Microstructuring of Semiconducting Materials |
| Journal |
Materials Science Forum (Volumes 173 - 174) |
| Volume |
Semiconductor Processing and Characterization with Lasers |
| Edited by |
M. Briege, H. Dittrich, M. Klose, H.W. Schock, J. Werner |
| Pages |
17-22 |
| DOI |
10.4028/www.scientific.net/MSF.173-174.17 |
| Authors |
W. Kautek,
Joachim Krüger
|
| Keywords |
Dry Etching, Femtosecond Pulse Laser, Laser-Ablation, Microstructuring, Multi-Photon Absorption, Semiconductors, Silicon, Subpicosecond-Pulse Laser |
| Full Paper |
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