Paper Title:
Laser Pulsed Induced Microwave Conductivity and Spectroscopic Ellipsometry Characterization of Helium and Hydrogen Plasma Damage of the Crystalline Silicon Surface
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 173-174)
Edited by
M. Briege, H. Dittrich, M. Klose, H.W. Schock, J. Werner
Pages
209-214
DOI
10.4028/www.scientific.net/MSF.173-174.209
Citation
H.C. Neitzert, N. Layadi, P. Roca i Cabarrocas, R. Vanderhaghen, M. Kunst, "Laser Pulsed Induced Microwave Conductivity and Spectroscopic Ellipsometry Characterization of Helium and Hydrogen Plasma Damage of the Crystalline Silicon Surface", Materials Science Forum, Vols. 173-174, pp. 209-214, 1995
Online since
September 1994
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