Surface Patterning and Thin-Film Formation by Pulsed-Laser Ablation |
| Journal |
Materials Science Forum (Volumes 173 - 174) |
| Volume |
Semiconductor Processing and Characterization with Lasers |
| Edited by |
M. Briege, H. Dittrich, M. Klose, H.W. Schock, J. Werner |
| Pages |
41-52 |
| DOI |
10.4028/www.scientific.net/MSF.173-174.41 |
| Citation |
D. Bäuerle et al., 1994, Materials Science Forum, 173-174, 41 |
| Authors |
D. Bäuerle, Enno Arenholz, J. Heitz, S. Proyer, E. Stangl, B. Luk'yanchuk |
| Keywords |
Pulsed-Laser Ablation, Surface Patterning, Thin Film Formation |
| Full Paper |
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