UV-Excimer Laser Ablation Patterning of II-VI Compound Semiconductors |
| Journal |
Materials Science Forum (Volumes 173 - 174) |
| Volume |
Semiconductor Processing and Characterization with Lasers |
| Edited by |
M. Briege, H. Dittrich, M. Klose, H.W. Schock, J. Werner |
| Pages |
59-66 |
| DOI |
10.4028/www.scientific.net/MSF.173-174.59 |
| Citation |
P.H. Key et al., 1994, Materials Science Forum, 173-174, 59 |
| Authors |
P.H. Key, D. Sands, F.X. Wagner |
| Keywords |
Ablation, CdTe, Excimer Lasers, II-VI Compounds, Patterning, ZnS |
| Full Paper |
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