Fabrication and Characterisation of N+ Doped Laser Crystallised Polysilicon |
| Journal |
Materials Science Forum (Volumes 173 - 174) |
| Volume |
Semiconductor Processing and Characterization with Lasers |
| Edited by |
M. Briege, H. Dittrich, M. Klose, H.W. Schock, J. Werner |
| Pages |
67-72 |
| DOI |
10.4028/www.scientific.net/MSF.173-174.67 |
| Citation |
E. Al-Nuaimy et al., 1994, Materials Science Forum, 173-174, 67 |
| Authors |
E. Al-Nuaimy, J.M. Marshall, T.E. Dyer, A.R. Hepburn, J.F. Davies |
| Keywords |
Electronic Properties, Laser Crystallisation, Laser Doping, Spin-on-Dopant, Structural Properties |
| Full Paper |
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