Low Temperature Deposition and Crystallization of Silicon by Means of Laser Techniques |
| Journal |
Materials Science Forum (Volumes 173 - 174) |
| Volume |
Semiconductor Processing and Characterization with Lasers |
| Edited by |
M. Briege, H. Dittrich, M. Klose, H.W. Schock, J. Werner |
| Pages |
7-16 |
| DOI |
10.4028/www.scientific.net/MSF.173-174.7 |
| Citation |
Motohiro Hirose, 1994, Materials Science Forum, 173-174, 7 |
| Authors |
Motohiro Hirose |
| Keywords |
Laser CVD, Laser Induced Crystrallization, Layer-by-Layer Growth, Polycristalline Silicon, Polysilane |
| Full Paper |
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