Paper Title:
Low Temperature Deposition and Crystallization of Silicon by Means of Laser Techniques
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 173-174)
Edited by
M. Briege, H. Dittrich, M. Klose, H.W. Schock, J. Werner
Pages
7-16
DOI
10.4028/www.scientific.net/MSF.173-174.7
Citation
M. Hirose, "Low Temperature Deposition and Crystallization of Silicon by Means of Laser Techniques ", Materials Science Forum, Vols. 173-174, pp. 7-16, 1995
Online since
September 1994
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Price
$32.00
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