Pulsed Laser Ablation: A Method for Deposition and Processing of Semiconductors at an Atomic Level |
| Journal |
Materials Science Forum (Volumes 173 - 174) |
| Volume |
Semiconductor Processing and Characterization with Lasers |
| Edited by |
M. Briege, H. Dittrich, M. Klose, H.W. Schock, J. Werner |
| Pages |
73-80 |
| DOI |
10.4028/www.scientific.net/MSF.173-174.73 |
| Citation |
J.J. Dubowski, 1994, Materials Science Forum, 173-174, 73 |
| Authors |
J.J. Dubowski |
| Keywords |
Atomic Level Processing, Epitaxial Growth, Laser-Assisted Dry Etching, Pulsed Laser Ablation, Semiconductor Quantum Superlattices, Semiconductor Quantum Wells |
| Full Paper |
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