Paper Title:
Role of Implantation-Induced Defects in Surface-Oriented Diffusion of Fluorine in Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 175-178)
Edited by
Yuan-Jin He, Bi-Song Cao and Y.C. Jean
Pages
545-548
DOI
10.4028/www.scientific.net/MSF.175-178.545
Citation
C. Szeles, B. Nielsen, P. Asoka-Kumar, K. G. Lynn, M. Anderle, T.P. Ma, G.W. Rubloff, "Role of Implantation-Induced Defects in Surface-Oriented Diffusion of Fluorine in Silicon", Materials Science Forum, Vols. 175-178, pp. 545-548, 1995
Online since
November 1994
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