Paper Title:
Characteristics of Si-SiO2 Systems Obtained by Thermal Oxidation of Silicon Surface Covered with Silicon-Hydrogen Layers
  Abstract

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Periodical
Materials Science Forum (Volumes 185-188)
Edited by
K.E. Heusler
Pages
105-108
DOI
10.4028/www.scientific.net/MSF.185-188.105
Citation
V.Y. Uritsky, B.B. Loginov, "Characteristics of Si-SiO2 Systems Obtained by Thermal Oxidation of Silicon Surface Covered with Silicon-Hydrogen Layers", Materials Science Forum, Vols. 185-188, pp. 105-108, 1995
Online since
March 1995
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