Paper Title:
Passivation and Depassivation of Electrically Active Centers in the Polysilicon-Oxide-Silicon Structures
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 185-188)
Edited by
K.E. Heusler
Pages
109-114
DOI
10.4028/www.scientific.net/MSF.185-188.109
Citation
I.A. Uritskaya, V.Y. Uritsky, "Passivation and Depassivation of Electrically Active Centers in the Polysilicon-Oxide-Silicon Structures", Materials Science Forum, Vols. 185-188, pp. 109-114, 1995
Online since
March 1995
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Price
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