Paper Title:
Passivation of Semiconductors by the Remote Plasma Technique
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 185-188)
Edited by
K.E. Heusler
Pages
155-164
DOI
10.4028/www.scientific.net/MSF.185-188.155
Citation
W. Kulisch, F. Kiel, M. Schiller, S. Reinke, R. Kassing, "Passivation of Semiconductors by the Remote Plasma Technique", Materials Science Forum, Vols. 185-188, pp. 155-164, 1995
Online since
March 1995
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Price
$32.00
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