Paper Title:
Passivation of GaAs with Sulphur Surface Treatment and UVCVD Silicon Nitride Cap Layer
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 185-188)
Edited by
K.E. Heusler
Pages
179-184
DOI
10.4028/www.scientific.net/MSF.185-188.179
Citation
H. Sik, J.L. Courant, B. Sermage, "Passivation of GaAs with Sulphur Surface Treatment and UVCVD Silicon Nitride Cap Layer", Materials Science Forum, Vols. 185-188, pp. 179-184, 1995
Online since
March 1995
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Price
$32.00
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